Model library and tool support for MEMS simulation

Peter Schwarz; Peter Schneider

doi:10.1117/12.425295

30 April 2001 Model library and tool support for MEMS simulation

Peter Schwarz, Peter Schneider

Proceedings Volume 4407, MEMS Design, Fabrication, Characterization, and Packaging; (2001) https://doi.org/10.1117/12.425295
Event: Microelectronic and MEMS Technologies, 2001, Edinburgh, United Kingdom

Abstract

FEM simulation is often a very time-consuming process in the design optimization of complex MEMS. System-level models with reduced order and accuracy have to be generated as a basis of a multi-domain system simulation. A powerful modelling methodology is needed to develop a library of MEMS models for different physical domains (mechanical, magnetic, fluidic, ...). The components are modelled as multi-terminal elements (multipoles) in generalized KIRCHHOFFian networks and are described with VHDL-AMS or other model description languages. Numerical model generation and parameterization is supported by a tool suite. Simulator coupling offers an additional possibility for analyzing heterogeneous MEMS.

Citation Download Citation

Peter Schwarz and Peter Schneider "Model library and tool support for MEMS simulation", Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); https://doi.org/10.1117/12.425295

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