Optical modeling of the analytical chamber of an IR gas sensor

Ingo Sieber; Horst Eggert; Karl-Heinz Suphan; Oliver Nuessen

doi:10.1117/12.425387

5 April 2001 Optical modeling of the analytical chamber of an IR gas sensor

Ingo Sieber, Horst Eggert, Karl-Heinz Suphan, Oliver Nuessen

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425387
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

Manufacturing test structures of microsensors and microactuators is very expensive in terms of time and materials. In a conventional design process, this limits the number of design variants to be considered. For this reason, computer-supported design techniques are becoming more and more important in microsystems technologies. In this paper, a system model of an IR gas sensor is presented. This model allows designs to be optimized, e.g. for use of the analysis chamber also to detect other gases with different absorption characteristics.

Citation Download Citation

Ingo Sieber, Horst Eggert, Karl-Heinz Suphan, and Oliver Nuessen "Optical modeling of the analytical chamber of an IR gas sensor", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425387

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