Traceable measurement results from scanning probe microscopes by laser interferometry

K. Hasche; Konrad Herrmann; R. Seemann; Hans-Joachim Buechner

doi:10.1117/12.439210

11 September 2001 Traceable measurement results from scanning probe microscopes by laser interferometry

K. Hasche, Konrad Herrmann, R. Seemann, Hans-Joachim Buechner

Proceedings Volume 4420, Laser Metrology for Precision Measurement and Inspection in Industry; (2001) https://doi.org/10.1117/12.439210
Event: Laser Metrology for Precision Management and Inspection in Industry, 2001, Florianopolis, Brazil

Abstract

A commercial scanning force microscope (SFM) has been equipped with an additional 3D position measurement system consisting of three miniature laser interferometers. This modification serves to further improve its metrological performance and calibration. This SFM is applied to topographical measurements including several types of calibration. In order to avoid the influence of Abbe errors two new interferometers have been implemented in the SFM. From this results a reduction of the measurement uncertainty. Furthermore, we report on a combination of the SFM including incorporated laser interferometers with a sophisticated detection system of another commercial scanning probe microscope. This enables to analyze further interactions between probe and specimen.

Citation Download Citation

K. Hasche, Konrad Herrmann, R. Seemann, and Hans-Joachim Buechner "Traceable measurement results from scanning probe microscopes by laser interferometry", Proc. SPIE 4420, Laser Metrology for Precision Measurement and Inspection in Industry, (11 September 2001); https://doi.org/10.1117/12.439210

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