Peculiarities of steam laser cleaning

Vadim P. Veiko; Elena A. Shakhno; Boris V. Volkovyski

doi:10.1117/12.456824

25 February 2002 Peculiarities of steam laser cleaning

Vadim P. Veiko, Elena A. Shakhno, Boris V. Volkovyski

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456824
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

The bubble nucleation in liquid laser cleaning is considered. The action of the thermal distribution in the liquid layer at the bubble size, vapor pressure in the bubble and liquid surface tension is investigated. The threshold value of the substrate surface temperature and its dependencies on physical properties of the liquid and surface roughness are defined.

Citation Download Citation

Vadim P. Veiko, Elena A. Shakhno, and Boris V. Volkovyski "Peculiarities of steam laser cleaning", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456824

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available