Cutting of optical materials by using femtosecond laser pulses

Stefan Nolte; Matthias Will; Markus Augustin; Peter Triebel; Karsten Zoellner; Andreas Tuennermann

doi:10.1117/12.448036

9 November 2001 Cutting of optical materials by using femtosecond laser pulses

Stefan Nolte, Matthias Will, Markus Augustin, Peter Triebel, Karsten Zoellner, Andreas Tuennermann

Proceedings Volume 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication; (2001) https://doi.org/10.1117/12.448036
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

In the past years, ultrashort pulse lasers have been established as precise and universal tools for the microstructuring of solid materials. Since thermal and mechanical influences are minimized, the application of this technology is also suitable for the structuring of optical materials and opens new possibilities. In this paper, the influence of pulse duration, pulse energy (fluence) and polarization on the cutting quality for glass and silicon will be discussed. As a concrete application, the cutting and micromarking of dielectric coated mirrors for high power fiber lasers will be highlighted.

Citation Download Citation

Stefan Nolte, Matthias Will, Markus Augustin, Peter Triebel, Karsten Zoellner, and Andreas Tuennermann "Cutting of optical materials by using femtosecond laser pulses", Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); https://doi.org/10.1117/12.448036

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