Applicability of iTIRM for roughness reduction monitoring

Robert-Jaap van der Bijl; Hedser H. van Brug; Oliver W. Faehnle; Joseph J. M. Braat

doi:10.1117/12.453632

27 December 2001 Applicability of iTIRM for roughness reduction monitoring

Robert-Jaap van der Bijl, Hedser H. van Brug, Oliver W. Faehnle, Joseph J. M. Braat

Proceedings Volume 4451, Optical Manufacturing and Testing IV; (2001) https://doi.org/10.1117/12.453632
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

The results obtained with iTIRM during polishing are presented. It is shown that iTIRM unites the working ranges of several other techniques where iTIRM can be used during production where the others cannot. The applicable range of iTIRM is shown to be at least 1 micrometers down to 0.1 nm rms.

Citation Download Citation

Robert-Jaap van der Bijl, Hedser H. van Brug, Oliver W. Faehnle, and Joseph J. M. Braat "Applicability of iTIRM for roughness reduction monitoring", Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); https://doi.org/10.1117/12.453632

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