Paper
27 December 2001 New approach for testing of aspherical micro-optics with high numerical aperture
Volker Kebbel, Hans-Juergen Hartmann, Werner P. O. Jueptner
Author Affiliations +
Abstract
The collimation of strongly diverging laser beams emitted by diode lasers is performed with aspherical micro-optical components. In order to obtain a good beam profile high- quality micro-lenses with a large numerical aperture compared to conventional lenses have to be applied. The characterization of these components using conventional interferometric techniques is not suitable, costly or inaccurate with respect to the required accuracy of the lens shape. In this paper Digital Holography as a measurement tool for the characterization of micro-optical components is presented, which has some advantageous properties with respect to other interferometric techniques. Results of the characterization of single cylindrical microlenses as well as microlens-arrays used for laser beam collimation and shaping are presented.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Volker Kebbel, Hans-Juergen Hartmann, and Werner P. O. Jueptner "New approach for testing of aspherical micro-optics with high numerical aperture", Proc. SPIE 4451, Optical Manufacturing and Testing IV, (27 December 2001); https://doi.org/10.1117/12.453633
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CITATIONS
Cited by 6 scholarly publications.
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KEYWORDS
Holograms

Wavefronts

3D image reconstruction

Digital holography

CCD cameras

Holography

Diffraction

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