Parametric monitoring for the SUMMiT V surface-micromachining process

Andrew D. Oliver; Danelle M. Tanner; Seethambal S. Mani; Scott E. Swanson; Karen S. Helgesen; Norman F. Smith

doi:10.1117/12.443008

2 October 2001 Parametric monitoring for the SUMMiT V surface-micromachining process

Andrew D. Oliver, Danelle M. Tanner, Seethambal S. Mani, Scott E. Swanson, Karen S. Helgesen, Norman F. Smith

Proceedings Volume 4558, Reliability, Testing, and Characterization of MEMS/MOEMS; (2001) https://doi.org/10.1117/12.443008
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

This paper reports on a set of parametric monitors for Sandia National Laboratories SUMMiT V (TM) (Sandia Ultra-planar Multi-level MEMS `i' Technology) five-level polysilicon surface micromachining process. Parametric monitors are typically used to monitor changes in the process due to either process drifts or intentional process changes. These parametric monitors are one of three types: electrical, electromechanical, or stress. In this paper we report on the design and characterization of these devices as well as how these devices are used to quantify the characteristics of the SUMMiT VTM process. We will demonstrate the use of these parametric devices in defining a baseline process.

Citation Download Citation

Andrew D. Oliver, Danelle M. Tanner, Seethambal S. Mani, Scott E. Swanson, Karen S. Helgesen, and Norman F. Smith "Parametric monitoring for the SUMMiT V surface-micromachining process", Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); https://doi.org/10.1117/12.443008

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