Integration nanometer indicating system for reducing temperature drift of interferometer

Jian Wu; Chunyong Yin

doi:10.1117/12.443084

2 October 2001 Integration nanometer indicating system for reducing temperature drift of interferometer

Jian Wu, Chunyong Yin

Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443084
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

The positioning system based on surface plasmon resonance (SPR) can achieve nanometer resolution and repeatility. A special retroreflector is designed that incidence angle of its first reflection surface is equal to resonance angle of SPR to implement the integrate SPR positioning system into the interferometer. At the beginning of a measurement, a zero position is determined by SPR positioning system. If there is drift during measurement, reset interferometer data to diminish drift as soon as the special retroreflector reaches the zero position. The integration interferometer is set up. Experiments show that long time uncertainty of interferometer is reduced from 60nm to 10nm. The measurement precision and stability of interferometer is increased.

Citation Download Citation

Jian Wu and Chunyong Yin "Integration nanometer indicating system for reducing temperature drift of interferometer", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); https://doi.org/10.1117/12.443084

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available