MEMS spatial light modulators with integrated electronics

Steven Cornelissen; Thomas G. Bifano; Paul A. Bierden

doi:10.1117/12.443099

2 October 2001 MEMS spatial light modulators with integrated electronics

Steven Cornelissen, Thomas G. Bifano, Paul A. Bierden

Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443099
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

The design and development of a microelectromechanical, micromachined spatial light modulator ((mu) SLM) with complementary metal-oxide semimconductor (CMOS) electronics, for control of optical phase in phase-only optical correlators is presented in this paper. A large array of piston-motion MEMS mirror segments make up the (mu) SLM. Each mirror segment will be capable of altering the phase of reflected light by up to one wavelength for infrared illumination ((lambda) =1.5micrometers ). The mirror segments, or pixels, are fabricated from metal in a low temperature process allowing for vertical integration of the (mu) SLM with CMOS based, 8-bit, control electronics. Proof-of- concept results, a proposed fabrication process and, preliminary process development results are also presented.

Citation Download Citation

Steven Cornelissen, Thomas G. Bifano, and Paul A. Bierden "MEMS spatial light modulators with integrated electronics", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); https://doi.org/10.1117/12.443099

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