Design and simulation of a novel piezoresistive accelerometer for high accuracy and overload ability

Wei Zhang; Xinping Cao; Bei Liu; Dacheng Zhang

doi:10.1117/12.444673

15 October 2001 Design and simulation of a novel piezoresistive accelerometer for high accuracy and overload ability

Wei Zhang, Xinping Cao, Bei Liu, Dacheng Zhang

Proceedings Volume 4600, Advances in Microelectronic Device Technology; (2001) https://doi.org/10.1117/12.444673
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

This paper presents the design and simulation of a novel acceleration sensor with high accuracy and overload ability. A super-stable structure with quad-beams , which has highly symmetric structure has been designed, and this help to eliminate the errors caused by the change of the dimensions and position of the piezoresistors in structure. At the same time, this structure induces films between the beams to reduce the cross-axis sensitivity. Some holes are made in the films to reduce the vertical rigidity. Thus, the films have little effect on the sensitivity. Besides, the sandwich structure is adopted In this device , the damping of the device is controlled by adjusting the clearances between the caps and the seismic mass ,which can obtain the large bandwidth and good frequency response. The bumps are made on two caps to get high overload ability. The piezoresistors are covered with metal layer to improve the electric performance. The structure made beneficial to the high resolution, low cross-axis sensitivity, high overload and good electric performance of the device.

Citation Download Citation

Wei Zhang, Xinping Cao, Bei Liu, and Dacheng Zhang "Design and simulation of a novel piezoresistive accelerometer for high accuracy and overload ability", Proc. SPIE 4600, Advances in Microelectronic Device Technology, (15 October 2001); https://doi.org/10.1117/12.444673

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available