Kumakhov optics use in reflectometry

Nariman S. Ibraimov; Anatoly V. Mozhayev; Ekaterina V. Likhushina; Oleg V. Mikhin

doi:10.1117/12.489757

30 July 2002 Kumakhov optics use in reflectometry

Nariman S. Ibraimov, Anatoly V. Mozhayev, Ekaterina V. Likhushina, Oleg V. Mikhin

Proceedings Volume 4765, International Conference on X-ray and Neutron Capillary Optics; (2002) https://doi.org/10.1117/12.489757
Event: International Conference on X-ray and Neutron Capillary Optics, 2001, Zvenigorod, Russian Federation

Abstract

An x-ray reflectometer has been developed based on Kumakhov's optics for roughness contorl fo polished surfaces and thin-film analysis for microelectronics applications. The half-lens used enables production of spatially collimated quasi-parallel x-ray required for the method, considerable decrease of the device's dimensions and x-ray power compared to existing models. The ability of Kumakhov's half-lenses to raise x-ray quanta density makes it possible to raise significantly the reflectometer's luminosity and reflectivity while reducing hte background.

Citation Download Citation

Nariman S. Ibraimov, Anatoly V. Mozhayev, Ekaterina V. Likhushina, and Oleg V. Mikhin "Kumakhov optics use in reflectometry", Proc. SPIE 4765, International Conference on X-ray and Neutron Capillary Optics, (30 July 2002); https://doi.org/10.1117/12.489757

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