PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
Selective operation of laser doping process and laser ablation process using KrF excimer laser irradiation (wavelength 248nm, pulse duration 20ns) was carried out that is used for fabricating an integrated gamma-ray imaging detector. At high vacuumed condition, laser irradiated surface region is heated up to ablated. At high-pressure condition, ablation is suppressed and impurity on the surface was melt and diffuse into the CdTe substrate.
We have fabricated an integrated imaging detector using above combination process. The detector showed low leakage current at room temperature and good gamma-ray detection property.
Atsushi Nakamura,Madan Niraula,Koji Asano,Toru Aoki, andYoshinori Hatanaka
"Excimer laser processing for the integrated gamma-ray detectors", Proc. SPIE 4784, X-Ray and Gamma-Ray Detectors and Applications IV, (10 January 2003); https://doi.org/10.1117/12.455779
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Atsushi Nakamura, Madan Niraula, Koji Asano, Toru Aoki, Yoshinori Hatanaka, "Excimer laser processing for integrated gamma-ray detectors," Proc. SPIE 4784, X-Ray and Gamma-Ray Detectors and Applications IV, (10 January 2003); https://doi.org/10.1117/12.455779