Hole drilling of glass-foam substrates with YAG laser

Makoto Emori; Yoshikazu Yoshida; Hiroshi Ogura; Shuhei Ueda

doi:10.1117/12.486558

19 February 2003 Hole drilling of glass-foam substrates with YAG laser

Makoto Emori, Yoshikazu Yoshida, Hiroshi Ogura, Shuhei Ueda

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486558
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

Using a 1.06 μm wavelength YAG laser, we have produced holes in glass-foam substrates. We have used three types of glass-foam made from 1-mm-thick quartz. The first type, called S1, contains 5% foam ranging in size from 2.0-50 μm. The second type, called S2, contains foam ranging in size from 0.1-0.5 μm. The third type, called S3, contains 12% foam ranging in size from 100-200 μm. We have drilled holes in these three types of glass-foam at pulse widths of 0.5-1.2msec and power of 0.5-3.0J. Only the S1 substrate is capable of creating a through hole at a power up to 0.8J. The height of the pile-up increases 15-40 μm with increasing power. The S1 substrate has better machinability than S2 and S3. The S1 substrate is suitable for laser beam machining.

Citation Download Citation

Makoto Emori, Yoshikazu Yoshida, Hiroshi Ogura, and Shuhei Ueda "Hole drilling of glass-foam substrates with YAG laser", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486558

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