Laser gap sensor used in electrostatic suspension system with optoelectronic feedback control

Shu-wen Cheng; Hai-jun Zhang; Xin-jie Wang

doi:10.1117/12.471874

20 September 2002 Laser gap sensor used in electrostatic suspension system with optoelectronic feedback control

Shu-wen Cheng, Hai-jun Zhang, Xin-jie Wang

Proceedings Volume 4919, Advanced Materials and Devices for Sensing and Imaging; (2002) https://doi.org/10.1117/12.471874
Event: Photonics Asia, 2002, Shanghai, China

Abstract

To implement electrostatic suspension with optoelectronic feedback control (ESOFC), real-time detection of the gap between the suspended object and the electrode is needed to determine the position of the object. In this article, we designed a laser gap sensor based on the principle of laser trigonometry, and developed a novel method to calibrate the nonlinearity of the conventional laser trigonometry by using a simple nonlinearity-correction circuit. Experiments show that this optimized sensor has an accuracy better than 7 μm when controlling the gap within the range from -2.0 mm to +2.0 mm, which meets the need of our ESOFC system quite well. Furthermore, it can also be widely applied in other displacement-detecting systems.

Citation Download Citation

Shu-wen Cheng, Hai-jun Zhang, and Xin-jie Wang "Laser gap sensor used in electrostatic suspension system with optoelectronic feedback control", Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); https://doi.org/10.1117/12.471874

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