Synthesis of diamond films at low temperature and study of nonlinear dynamic synthesis process

Qingxun Zhao; Yong Shang; Lifang Dong; Guangsheng Fu; Zheng Yan; Jingfa Yang

doi:10.1117/12.465651

20 September 2002 Synthesis of diamond films at low temperature and study of nonlinear dynamic synthesis process

Qingxun Zhao, Yong Shang, Lifang Dong, Guangsheng Fu, Zheng Yan, Jingfa Yang

Proceedings Volume 4919, Advanced Materials and Devices for Sensing and Imaging; (2002) https://doi.org/10.1117/12.465651
Event: Photonics Asia, 2002, Shanghai, China

Abstract

In this paper, the experimental synthesis of diamond films and optical emission spectroscopy (OES) of the gaseous phase species are studied in the range of substrate temperature from Ts = 300°C to 850°C. The high quality sub-microcrystalline diamond films are successfully deposited at substrate temperature (330 ≈ 340)°C by adopting glow plasma assisted hot filament chemical vapor deposition (GPCVD). For the first time, in situ OES is applied to diagnose weak signal of GPCVD system when CH₄ and H₂ are used as the input gas, and the reactive species are identified in diamond growth processes. A primary model of diamond films growing at low temperature is presented by studying dynamic behavior for nonequilibrium plasma reactions.

Citation Download Citation

Qingxun Zhao, Yong Shang, Lifang Dong, Guangsheng Fu, Zheng Yan, and Jingfa Yang "Synthesis of diamond films at low temperature and study of nonlinear dynamic synthesis process", Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); https://doi.org/10.1117/12.465651

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available