Advances in interferometric metrology

James C. Wyant

doi:10.1117/12.472495

20 September 2002 Advances in Interferometric Metrology

James C. Wyant

Proceedings Volume 4927, Optical Design and Testing; (2002) https://doi.org/10.1117/12.472495
Event: Photonics Asia, 2002, Shanghai, China

Abstract

Modern electronics, computers, and software have made interferometry an extremely powerful tool in many fields including the testing of optical components and optical systems. This paper will discuss some of the recent advances in reducing the sensitivity of phase-shifting interferometers to vibration.

Citation Download Citation

James C. Wyant "Advances in Interferometric Metrology", Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); https://doi.org/10.1117/12.472495

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