Rewritable optical recording In-Zn oxide films grown by pulsed laser deposition method

Takanori Aoki; Akio Suzuki; Tatsuhiko Matsushita; Makoto Akizuki; Masahiro Okuda

doi:10.1117/12.510302

9 April 2003 Rewritable optical recording In-Zn oxide films grown by pulsed laser deposition method

Takanori Aoki, Akio Suzuki, Tatsuhiko Matsushita, Makoto Akizuki, Masahiro Okuda

Proceedings Volume 5060, Sixth International Symposium on Optical Storage (ISOS 2002); (2003) https://doi.org/10.1117/12.510302
Event: Sixth International Symposium on Optical Storage (ISOS 2002), 2002, Wuhan, China

Abstract

The In-Zn oxide films with a laminated multilayer structure of each layer of In₂O₃ and ZnO were grown on glass substrates or polycarbonate disk substrates by pulsed laser deposition using a split target consisted of In₂O₃ and ZnO. For the disk sample with 60-layers, which was approximately 30 nm thick, fabricated at the trace ratio (the ratio of time required to irradiate each part of the split target) of In₂O₃:ZnO = 1:1, the CNR of approximately 60 dB was obtained for 3T signal (f = 58.5 MHz, λ = 406 nm, NA = 0.65).

Citation Download Citation

Takanori Aoki, Akio Suzuki, Tatsuhiko Matsushita, Makoto Akizuki, and Masahiro Okuda "Rewritable optical recording In-Zn oxide films grown by pulsed laser deposition method", Proc. SPIE 5060, Sixth International Symposium on Optical Storage (ISOS 2002), (9 April 2003); https://doi.org/10.1117/12.510302

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