Micro- and nanomachining of transparent dielectrics by two short interfered laser pulses

Masahiro Hirano; Ken-ichi Kawamura; Hideo Hosono

doi:10.1117/12.517322

16 July 2003 Micro- and nanomachining of transparent dielectrics by two short interfered laser pulses

Masahiro Hirano, Ken-ichi Kawamura, Hideo Hosono

Proceedings Volume 5061, International Symposium on Photonic Glass (ISPG 2002); (2003) https://doi.org/10.1117/12.517322
Event: International Symposium on Photonic Glass, 2002, Shanghai, China

Abstract

Single shot irradiation of interfered fs laser pulses allows for encoding non-erasable periodic nano-structures in almost all kinds of materials. However, strong absorption of the intense laser pulses at the material surface and the possible distortion of the pulse due to the non-linear interaction with materials make it very difficult to fabricate embedded structures inside inorganic dielectric materials. We have overcome this difficulty by using chirped pulses from Ti:sapphire fs pulse laser. The chirping stretches laser pulse width from 100 fs to 5 ps without changing the total energy, thus reducing the peak energy of the pulse. Multiple micro-gratings were encoded vertically inside silica glass at a depth of ~5 mm from the surface by using the pulse with an optimized pulse width of 500 fs. The present technique provides unique opportunity to fabricate embedded diffractive devices such as fiber gratings of pure silica fiber, optical couplers in planar waveguides and diffractive gratings in DFB lasers.

Citation Download Citation

Masahiro Hirano, Ken-ichi Kawamura, and Hideo Hosono "Micro- and nanomachining of transparent dielectrics by two short interfered laser pulses", Proc. SPIE 5061, International Symposium on Photonic Glass (ISPG 2002), (16 July 2003); https://doi.org/10.1117/12.517322

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