Shadowgraphic imaging of metal drilling with a long pulse excimer laser

Aart Schoonderbeek; Cornelis A. Biesheuvel; Ramon M. Hofstra; Klaus-Jochen Boller; Johan Meijer

doi:10.1117/12.540741

18 November 2003 Shadowgraphic imaging of metal drilling with a long pulse excimer laser

Aart Schoonderbeek, Cornelis A. Biesheuvel, Ramon M. Hofstra, Klaus-Jochen Boller, Johan Meijer

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540741
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

A shadowgraphic imaging technique is used for studying the interaction between the laser beam and the material during laser drilling. The used laser is a XeCl excimer laser with a nearly diffraction limited beam and 175 ns pulse length. We studied how and when the material is removed. Holes are drilled with a series of pulses in aluminum and Hastelloy X. The shadowgraphic images show the development of a shockwave whose expansion is in agreement with theory. Both the removal of material at different times after the start of the laser pulse and the material removal for different pulses during the drilling process are shown. Material removal occurs by vaporization as well as melt ejection. Our experiments show the same amount of removed material for drilling with different cover gases. The shadowgraphic images show that the larger part of the material is removed after the end of the laser pulse.

Citation Download Citation

Aart Schoonderbeek, Cornelis A. Biesheuvel, Ramon M. Hofstra, Klaus-Jochen Boller, and Johan Meijer "Shadowgraphic imaging of metal drilling with a long pulse excimer laser", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.540741

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