Paper
8 August 2003 Investigation of processes of manufacturing hologram diffraction gratings based on As-S-Se layers
Sergey A. Kostyukevych, Peter E. Shepeljavi, Peter F. Romanenko, Nadya L. Moskalenko, Piotr M. Tomchuk
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Abstract
Results of investigation of processes providing formation of hologram diffraction gratings based on As2S3 layers are represented. Using the method of atomic force microscopy the groove profile shape is studied for these gratings in dependency on exposure values. Carried out are measurements of their diffraction efficiency dependencies and analyzed is their relation to the relief shape of the grating surface.
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Sergey A. Kostyukevych, Peter E. Shepeljavi, Peter F. Romanenko, Nadya L. Moskalenko, and Piotr M. Tomchuk "Investigation of processes of manufacturing hologram diffraction gratings based on As-S-Se layers", Proc. SPIE 5123, Advanced Optical Devices, Technologies, and Medical Applications, (8 August 2003); https://doi.org/10.1117/12.521489
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KEYWORDS
Diffraction gratings

Holograms

Photoresist materials

Manufacturing

Diffraction

Etching

Cadmium

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