Actinic aerial image measurement tool for 157-nm mask qualification

Takashi Yasui; Iwao Higashikawa; Peter Kuschnerus; Thomas Engel; Axel M. Zibold; Claudia Hertfelder; Yuji Kobiyama; Jan-Peter Urbach; Christof M. Schilz; Armin Semmler

doi:10.1117/12.504215

28 August 2003 Actinic aerial image measurement tool for 157-nm mask qualification

Takashi Yasui, Iwao Higashikawa, Peter Kuschnerus, Thomas Engel, Axel M. Zibold, Claudia Hertfelder, Yuji Kobiyama, Jan-Peter Urbach, Christof M. Schilz, Armin Semmler

Author Affiliations +

Proceedings Volume 5130, Photomask and Next-Generation Lithography Mask Technology X; (2003) https://doi.org/10.1117/12.504215
Event: Photomask and Next Generation Lithography Mask Technology X, 2003, Yokohama, Japan

Abstract

The challenge to achieve an early introduction of 157 nm lithography requires various advanced metrology systems to evaluate the 65 nm node lithography performances, equipments and processes. Carl Zeiss AIMS tool based on the Aerial Image Measurement Software is the most promising approach to evaluate the mask quality in terms of aerial image properties, in order to assess post repair quality. Selete has joint activities with Carl Zeiss, International SEMATECH and Infineon to accelerate the development of an AIMS tool operating at the 157 nm wavelength. The alpha tool phase of the project has been completed, and beta tools are currently being built. This paper is discussing the results from measurements on the alpha tool of some 157 nm attenuated phase shift masks (Att-PSM). Resolution results and CD evaluation with respect to these measurements will be presented.

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Takashi Yasui, Iwao Higashikawa, Peter Kuschnerus, Thomas Engel, Axel M. Zibold, Claudia Hertfelder, Yuji Kobiyama, Jan-Peter Urbach, Christof M. Schilz, and Armin Semmler "Actinic aerial image measurement tool for 157-nm mask qualification", Proc. SPIE 5130, Photomask and Next-Generation Lithography Mask Technology X, (28 August 2003); https://doi.org/10.1117/12.504215

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