Film Thickness Monitoring With A Fiber Optic Realtime Spectrometer

H. E. Korth

doi:10.1117/12.945086

12 November 1984 Film Thickness Monitoring With A Fiber Optic Realtime Spectrometer

H. E. Korth

Proceedings Volume 0514, 2nd Intl Conf on Optical Fiber Sensors: OFS'84; (1984) https://doi.org/10.1117/12.945086
Event: 2nd International Conference on Optical Fiber Sensors, 1984, Stuttgart, Germany

Abstract

A computer integrated spectral sensor is described that allows simple interfacing with manufacturing and testing devices. Several applications are discussed.

Citation Download Citation

H. E. Korth "Film Thickness Monitoring With A Fiber Optic Realtime Spectrometer", Proc. SPIE 0514, 2nd Intl Conf on Optical Fiber Sensors: OFS'84, (12 November 1984); https://doi.org/10.1117/12.945086

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