Vector simulations of dark beam interaction with nanoscale surface features

Alexander V. Tavrov; Norbert Kerwien; Reinhard Berger; Hans J. Tiziani; Michael Totzeck; Boris Spektor; Josef Shamir; Gregory Toker; Andrei Brunfeld

doi:10.1117/12.500588

30 May 2003 Vector simulations of dark beam interaction with nanoscale surface features

Alexander V. Tavrov, Norbert Kerwien, Reinhard Berger, Hans J. Tiziani, Michael Totzeck, Boris Spektor, Josef Shamir, Gregory Toker, Andrei Brunfeld

Author Affiliations +

Proceedings Volume 5144, Optical Measurement Systems for Industrial Inspection III; (2003) https://doi.org/10.1117/12.500588
Event: Optical Metrology, 2003, Munich, Germany

Abstract

In earlier publications, it was shown that scanning of surfaces by dark beams can be exploited for sub-wavelength feature analysis. In this work, we present vector simulations based in Rigorous Coupled-Wave Analysis with the purpose to estimate the expected resolution of the method, both lateral (feature size) and axial (height). The dark beam used in this study has a line singularity generated by a π-phase step positioned in a Gaussian beam. Various combinations of the illumination and detection nuFmerical apertures (from NA=0.2 to NA=0.8) and different surface features were studied. Polarization effects which become significant at high numerical apetures, were considered as an additional source of information for the analysis. In the case of a sub-wavelength feature on an ideal surface, the resolution of the method is limited only by the electronics noise. In particular, under a reasonable assumption of a 10⁵ signal to noise ratio, it is possible to detect a 0.2 nm step.

Citation Download Citation

Alexander V. Tavrov, Norbert Kerwien, Reinhard Berger, Hans J. Tiziani, Michael Totzeck, Boris Spektor, Josef Shamir, Gregory Toker, and Andrei Brunfeld "Vector simulations of dark beam interaction with nanoscale surface features", Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); https://doi.org/10.1117/12.500588

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