Study of properties and preparation conditions of plasmochemical SiO2 films

V. M. Izgorodin; Yu. V. Tolokonnikova; A. A. Aushev; A. I. Vasil'eva; V. G. Gogolev; A. F. Kovylov; E. G. Orlikova; I. G. Sevrugin

doi:10.1117/12.537457

12 December 2003 Study of properties and preparation conditions of plasmochemical SiO₂ films

V. M. Izgorodin, Yu. V. Tolokonnikova, A. A. Aushev, A. I. Vasil'eva, V. G. Gogolev, A. F. Kovylov, E. G. Orlikova, I. G. Sevrugin

Author Affiliations +

Proceedings Volume 5228, ECLIM 2002: 27th European Conference on Laser Interaction with Matter; (2003) https://doi.org/10.1117/12.537457
Event: ECLIM 2002: 27th European conference on Laser Interaction with Matter, 2002, Moscow, Russian Federation

Abstract

The results of research of properties and preparation conditions of the plasmochemical SiO₂ films are submitted. These films coated various substrates (glass, metals, NaCl). Film deposition was carried out by decomposition of the tetraethoxycilane vapor by the electrical discharge with the frequency of about 18 kHz. The excessive products of decomposition were pumped out with maintenance of the tetraethoxycilane vapor and argon pressure of about 0.2 Torr. The study of element structure has shown that the film represents Si_xO_y with x ≈ 1 and y ≈ 2 and contains an impurity of organic inclusions. Density and index of refraction of a coating are close to these parameters for glass SiO₂. The form of the film surface is investigated depending on the coating conditions. Infrared spectra of absorption and Raman spectra are investigated. The results of attempts of the iodine in this film as an impurity are given. This method is applied for preparing of the covering with uniform thickness on glass microspheres used as targets in laser fusion experiments on the installation "Iskra-5."

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V. M. Izgorodin, Yu. V. Tolokonnikova, A. A. Aushev, A. I. Vasil'eva, V. G. Gogolev, A. F. Kovylov, E. G. Orlikova, and I. G. Sevrugin "Study of properties and preparation conditions of plasmochemical SiO₂ films", Proc. SPIE 5228, ECLIM 2002: 27th European Conference on Laser Interaction with Matter, (12 December 2003); https://doi.org/10.1117/12.537457

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