Nonscanning 3D profile parallel confocal detecting system based on DLP technology

Yonghong Wang; Xiaofen Yu; Ruijun Li; Yetai Fei

doi:10.1117/12.521675

2 September 2003 Nonscanning 3D profile parallel confocal detecting system based on DLP technology

Yonghong Wang, Xiaofen Yu, Ruijun Li, Yetai Fei

Proceedings Volume 5253, Fifth International Symposium on Instrumentation and Control Technology; (2003) https://doi.org/10.1117/12.521675
Event: Fifth International Symposium on Instrumentation and Control Technology, 2003, Beijing, China

Abstract

Based on micro-optical devices, a non-scanning 3D profile detecting system is proposed. A 2D point light source array produced by the Micro-optical device is used to form parallel confocal system. It realizes whole-field in-step detecting of measuring plane. In the detecting system, Digital Light Processing (DLP) technology is used, and a Digital Micromirror Device (DMD) substitutes conventional micro-optical elements (like micro-lens array). Therefore, it realizes portable and programmable 2D point light source imaging. All the measuring parameters that influence the measurement can easily be adapted by software to satisfy different requests of measurement. The construction and working principle of the no-scanning 3D detecting system is studied. The method of 3D profile reconstruction is introduced. Experiment result is obtained, which indicates that DLP technology is applicable in confocal detecting.

Citation Download Citation

Yonghong Wang, Xiaofen Yu, Ruijun Li, and Yetai Fei "Nonscanning 3D profile parallel confocal detecting system based on DLP technology", Proc. SPIE 5253, Fifth International Symposium on Instrumentation and Control Technology, (2 September 2003); https://doi.org/10.1117/12.521675

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