Accurately nonselective and selective etching of GaAs/Al0.8Ga0.2As/AlAs structure for making air-gap cavity

Zhou Zhen; Yun Du; Yongqing Huang; Ronghan Wu; Xiaomin Ren

doi:10.1117/12.521698

12 May 2004 Accurately nonselective and selective etching of GaAs/Al_0.8Ga_0.2As/AlAs structure for making air-gap cavity

Zhou Zhen, Yun Du, Yongqing Huang, Ronghan Wu, Xiaomin Ren

Author Affiliations +

Proceedings Volume 5280, Materials, Active Devices, and Optical Amplifiers; (2004) https://doi.org/10.1117/12.521698
Event: Asia-Pacific Optical and Wireless Communications, 2003, Wuhan, China

Abstract

We have demonstrated a wet etching technique capable of fabricating air-gap cavity. The process utilizes nonselective and selective etchants respectively to form air-gap cavity. The etching characteristics of GaAs/Al_0.8Ga_0.2As/AlAs structure in different nonselective and selective etchants are investigated. The volumetric 3:2:20 ratios of H₃PO₄/H₂O₂/H₂O solution and volumetric 600:1 ratio of DI water/buffered oxide [mixture of 7:1 NH₄F(36%)-HF(6.4%)] solution are better nonselective and selective etchants respectively. We have used this process technique to form a tunable air-gap cavity optical filter. The measure results of the transmission spectral show that the air-gap cavity has high optical quality. These simple etching processes can be applied to fabricate the air-gap cavity devices.

Citation Download Citation

Zhou Zhen, Yun Du, Yongqing Huang, Ronghan Wu, and Xiaomin Ren "Accurately nonselective and selective etching of GaAs/Al_0.8Ga_0.2As/AlAs structure for making air-gap cavity", Proc. SPIE 5280, Materials, Active Devices, and Optical Amplifiers, (12 May 2004); https://doi.org/10.1117/12.521698

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available