Ultrafast chemical-sensing microsystem employing resistive nanomaterials

Su L Tan; James A Covington; Julian W Gardner

doi:10.1117/12.539995

29 July 2004 Ultrafast chemical-sensing microsystem employing resistive nanomaterials

Su L Tan, James A Covington, Julian W Gardner

Author Affiliations +

Proceedings Volume 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2004) https://doi.org/10.1117/12.539995
Event: Smart Structures and Materials, 2004, San Diego, CA, United States

Abstract

This paper reports a novel ultra-fast chemosensor array microsystem for the rapid detection of volatile organic compounds (VOCs). The sensing device consists of an array of 80 miniature resistive sensors on a 10 mm by 10 mm silicon substrate, configured in 5 rows of 16 elements. In this application each row has been deposited with a different carbon black/polymer composite nanomaterial. As a result of arranging the sensors in the matrix fashion, we are able to represent the sensor response as an olfactory image. The sensor array was tested with pulses of ethanol, toluene, toluene and ethanol mixture, milk, cream, cypress oil and peppermint oil at two different flow rates (60 and 130 ml/min) and three different pulse widths (10, 25, and 50 secs). Preliminary analysis was performed by comparing different images which showed excellent discrimination between the different analytes. Increasing the pulse width and flow rate improved the discrimination capability of the system. We have also investigated the effect of 'stereo' olfactory imaging by combining mono images measured at different flow rates to form a composite image. Results have shown such scheme can provide additional discriminatory information.

Citation Download Citation

Su L Tan, James A Covington, and Julian W Gardner "Ultrafast chemical-sensing microsystem employing resistive nanomaterials", Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004); https://doi.org/10.1117/12.539995

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