Calibration of an electro-optical variable circular retarder with application in a nulling microellipsometer

Yew Li Hor; Qiwen Zhan

doi:10.1117/12.540845

21 July 2004 Calibration of an electro-optical variable circular retarder with application in a nulling microellipsometer

Yew Li Hor, Qiwen Zhan

Author Affiliations +

Proceedings Volume 5392, Testing, Reliability, and Application of Micro- and Nano-Material Systems II; (2004) https://doi.org/10.1117/12.540845
Event: NDE for Health Monitoring and Diagnostics, 2004, San Diego, CA, United States

Abstract

We report on the design and calibration of a high speed electro-optical variable circular retarder (EOVCR). This retarder consists of an electro-optical variable linear retarder and two quarter-wave plates aligned at specific angles. This EOVCR provides a pure polarization rotation that is independent of the initial incoming polarization. Application of this device in a rotationally symmetric microellipsometer design is also discussed. The use of such an EOVCR eliminates the vibrational noise reported in the previously reported microellipsometer design and allows a high speed nulling detection scheme to be used, substantially improving the accuracy of microellipsometer.

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Yew Li Hor and Qiwen Zhan "Calibration of an electro-optical variable circular retarder with application in a nulling microellipsometer", Proc. SPIE 5392, Testing, Reliability, and Application of Micro- and Nano-Material Systems II, (21 July 2004); https://doi.org/10.1117/12.540845

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