Paper
28 May 2004 Approach to terabit density for magnetic data storage using direct optical patterning of Fe(Co)-based thin films
Nikolay I. Polushkin, B. A. Gribkov, A. Ya. Lopatin
Author Affiliations +
Proceedings Volume 5401, Micro- and Nanoelectronics 2003; (2004) https://doi.org/10.1117/12.562650
Event: Micro- and Nanoelectronics 2003, 2003, Zvenigorod, Russian Federation
Abstract
We report on physical mechanisms and methods for optical (λ=300-150 nm) patterning of thin alloyed layers of transition metals (Fe, Co) via laser-induced ferromagnetic ordering (LIFO) in the initially paramagnetic alloys. It is argued that LIFO preceded by film melting and arises due to phase separation in the alloys. Using a laser (λ=300-150 nm) interferometric technique for direct patterning on the phase transitions, we have successfully produced large-area (up to 1 cm) arrays of nanoscale (down to 100 nm) magnets. Due to the observed threshold character of LIFO, the patterned features can be small comparable to the radiation wavelength (~λ/10). This finding is expected to allow making the extreme features (down to 15-20 nm) and thus gives a potential advantage for using such directly patterned magnetic media in future storage data systems with ultrahigh densities ( ~ 1 Tbit/in2). The first experiments on formation of the extreme features by use of LIFO have been performed.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nikolay I. Polushkin, B. A. Gribkov, and A. Ya. Lopatin "Approach to terabit density for magnetic data storage using direct optical patterning of Fe(Co)-based thin films", Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); https://doi.org/10.1117/12.562650
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KEYWORDS
Magnetism

Optical lithography

Multiphoton fluorescence microscopy

Data storage

Ferromagnetics

Annealing

Iron

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