Reconstruction of grating parameters from ellipsometric data

Martin Foldyna; Dalibor Ciprian; Jaromir Pistora; Kamil Postava; R. Antos

doi:10.1117/12.560118

7 April 2004 Reconstruction of grating parameters from ellipsometric data

Martin Foldyna, Dalibor Ciprian, Jaromir Pistora, Kamil Postava, R. Antos

Proceedings Volume 5445, Microwave and Optical Technology 2003; (2004) https://doi.org/10.1117/12.560118
Event: Microwave and Optical Technology 2003, 2003, Ostrava, Czech Republic

Abstract

This paper presents specific experimental ellipsometric data fit of dielectric 2D grating, which can be characterized as very shallow structure. The grating pattern is of squared shape, with sharp edges and depth to period ratio about 1/1000. The rigorous coupled wave analysis (RCWA) was used for characterization of grating response on optical wavelengths. Boundary conditions were formulated using transfer matrix method. Material parameters of the patterned dots are supposed to be known from additional experiments. The task of the fit si to find unknown thickness of all parts of dots.

Citation Download Citation

Martin Foldyna, Dalibor Ciprian, Jaromir Pistora, Kamil Postava, and R. Antos "Reconstruction of grating parameters from ellipsometric data", Proc. SPIE 5445, Microwave and Optical Technology 2003, (7 April 2004); https://doi.org/10.1117/12.560118

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