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The parameters of two dispersion models for Si3N4 dots of multilayer 2D grating are established by the fitting procedures. The Gauss-Newton and Levenberg-Marquardt fitting algorithms are compared. Spectral ellipsometric measurements as the resource of experimental data are reported. In the objective function, various weighting coefficients corresponding to ellipsometric angles are tested.
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Jaroslav Vlcek, Jaromir Pistora, "Some numerical models of dispersion curve fitting," Proc. SPIE 5445, Microwave and Optical Technology 2003, (7 April 2004); https://doi.org/10.1117/12.560128