The fabrication and characterization of plastic microlens arrays by deep lithography with protons

Heidi Ottevaere; Virginia Gomez; Bart Volckaerts; Michael Vervaeke; Pedro Vynck; Alex Hermanne; Hugo Thienpont

doi:10.1117/12.546452

8 September 2004 The fabrication and characterization of plastic microlens arrays by deep lithography with protons

Heidi Ottevaere, Virginia Gomez, Bart Volckaerts, Michael Vervaeke, Pedro Vynck, Alex Hermanne, Hugo Thienpont

Proceedings Volume 5453, Micro-Optics, VCSELs, and Photonic Interconnects; (2004) https://doi.org/10.1117/12.546452
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

In this paper we present the state-of-the-art of Deep Lithography with Protons (DLP), a technology that we have adopted and optimized to rapidly prototype three-dimensional micro-optical components and high-aspect ratio micro-mechanical structures in Poly(Methyl MethAcrylate). In particular we focus on the fabrication of individual plastic refractive microlenses featuring a wide range of numerical apertures, diameters and pitches and their 2D arrays. We give a detailed description of the microlens fabrication technique and the calibration procedure that goes along with it. We highlight the quantitative geometrical and optical characteristics of these DLP microlenses and we demonstrate the reproducibility of their fabrication process. We also illustrate the prototyping flexibility of DLP by making arrays featuring microlenses with different sags, pitches and diameters.

Citation Download Citation

Heidi Ottevaere, Virginia Gomez, Bart Volckaerts, Michael Vervaeke, Pedro Vynck, Alex Hermanne, and Hugo Thienpont "The fabrication and characterization of plastic microlens arrays by deep lithography with protons", Proc. SPIE 5453, Micro-Optics, VCSELs, and Photonic Interconnects, (8 September 2004); https://doi.org/10.1117/12.546452

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available