Application of the vortex transform to microscopic interferometry

Sylvain Petitgrand; Alain Bosseboeuf; Matthieu Guirardel

doi:10.1117/12.545509

17 August 2004 Application of the vortex transform to microscopic interferometry

Sylvain Petitgrand, Alain Bosseboeuf, Matthieu Guirardel

Proceedings Volume 5458, Optical Micro- and Nanometrology in Manufacturing Technology; (2004) https://doi.org/10.1117/12.545509
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

Interferogram analysis techniques able to compute phase or contrast maps from a single interferogram are useful for fast measurements of surface profiles, of out-of-plane displacement fields under thermal or mechanical loading, and of vibration mode shapes. Well known single interferogram techniques are Fast Fourier Transform (FFT) analysis, spatial carrier phase stepping and synchronous detection techniques. These techniques typically need a sample tilting to introduce a fringe spatial carrier and fail when the interferograms contain closed fringes. A 2D fringe pattern demodulation technique which overcomes these limitations is the Vortex Transform method proposed recently by K.G. Larkin et al. In this paper a fully automated version of this technique is described. Then it applied on real interferograms recorded on microdevices by microscopic homodyne interferometry is demonstrated.

Citation Download Citation

Sylvain Petitgrand, Alain Bosseboeuf, and Matthieu Guirardel "Application of the vortex transform to microscopic interferometry", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); https://doi.org/10.1117/12.545509

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