Novel design and prototyping of a micro-optical distance sensor considering a distributed fabrication

Uwe Hollenbach; Juergen Mohr; Toru Oka; Ulrike Wallrabe; Ingo Sieber

doi:10.1117/12.546023

1 September 2004 Novel design and prototyping of a micro-optical distance sensor considering a distributed fabrication

Uwe Hollenbach, Juergen Mohr, Toru Oka, Ulrike Wallrabe, Ingo Sieber

Proceedings Volume 5459, Optical Sensing; (2004) https://doi.org/10.1117/12.546023
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

A novel design for a compact and robust micro optical distance sensor is presented. It is suitable for mass fabrication by micro molding known form the LIGA technique [1] and automatic assembly. Due to a modular design approach a distributed fabrication of the device modules is currently implemented. This allows a separate fabrication of the modules at several manufacturers each one being an expert for the special technology needed to fabricate the module. During the design phase not only the optical specification of the sensor system but also all requirements given by the manufacturers, such as easy manufacturability with high throughput as well as defined interfaces need to be considered.

Citation Download Citation

Uwe Hollenbach, Juergen Mohr, Toru Oka, Ulrike Wallrabe, and Ingo Sieber "Novel design and prototyping of a micro-optical distance sensor considering a distributed fabrication", Proc. SPIE 5459, Optical Sensing, (1 September 2004); https://doi.org/10.1117/12.546023

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