Fundamental noise in MEMS force sensors

Thomas W. Kenny; Yiching Liang; Beth L. Pruitt; Jonah A. Harley; Michael Bartsch; Robert Rudnitsky

doi:10.1117/12.549814

25 May 2004 Fundamental noise in MEMS force sensors

Thomas W. Kenny, Yiching Liang, Beth L. Pruitt, Jonah A. Harley, Michael Bartsch, Robert Rudnitsky

Proceedings Volume 5472, Noise and Information in Nanoelectronics, Sensors, and Standards II; (2004) https://doi.org/10.1117/12.549814
Event: Second International Symposium on Fluctuations and Noise, 2004, Maspalomas, Gran Canaria Island, Spain

Abstract

In recent years, MEMS devices have been developed for a wide variety of applications. Many of the signals that these sensors are intended to detect are expressed as forces that stress or deflect the micromechanical structure. As sensors are miniaturized, these forces naturally become smaller, and techniques for detection are required to improve. As the force sensing capabilities of MEMS devices have improved, it has become possible to apply these devices to interesting scientific experiments on biological systems.

Citation Download Citation

Thomas W. Kenny, Yiching Liang, Beth L. Pruitt, Jonah A. Harley, Michael Bartsch, and Robert Rudnitsky "Fundamental noise in MEMS force sensors", Proc. SPIE 5472, Noise and Information in Nanoelectronics, Sensors, and Standards II, (25 May 2004); https://doi.org/10.1117/12.549814

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