Paper
15 July 2004 New trends and results in fs-laser-driven materials processing
Laszlo Nanai, Sandor Szatmari, Gregory J. Taft, Thomas F. George
Author Affiliations +
Proceedings Volume 5506, Nonresonant Laser-Matter Interaction (NLMI-11); (2004) https://doi.org/10.1117/12.579985
Event: Nonresonant Laser-Matter Interaction (NLMI-11), 2003, St. Petersburg, Russian Federation
Abstract
In this paper we report on the state-of-the-art of the ultrashort (fs) laser pulse-driven surface microprocessing of materials [metals, semiconductors and dielectrics (glasses and polymers)]. We emphasize the advantages of fs time scale pulses of laser-matter interactions, e.g., no heat effects in laser-coupled outside zones in plasma breakdown below intensity scales. A two-temperature model (energy coupling between electronic and phonon subsystems), the role of Dember effects, and ballistic transport are also considered.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Laszlo Nanai, Sandor Szatmari, Gregory J. Taft, and Thomas F. George "New trends and results in fs-laser-driven materials processing", Proc. SPIE 5506, Nonresonant Laser-Matter Interaction (NLMI-11), (15 July 2004); https://doi.org/10.1117/12.579985
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KEYWORDS
Pulsed laser operation

Electrons

Materials processing

Laser-matter interactions

Semiconductor lasers

Semiconductors

Phonons

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