Fabrication of microlens using CO2 laser and characterization of formation process

Hiroshi Murotani; Moriaki Wakaki; Shuichi Kawabata; Kenji Nakamoto

doi:10.1117/12.560369

29 September 2004 Fabrication of microlens using CO₂ laser and characterization of formation process

Hiroshi Murotani, Moriaki Wakaki, Shuichi Kawabata, Kenji Nakamoto

Proceedings Volume 5525, Laser Beam Shaping V; (2004) https://doi.org/10.1117/12.560369
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

Microlenses were formed directly on a surface of a glass plate by using CO₂ laser. This method has the merit of complete dry processing and presents simple way of microlens fabrication. We discuss about the formation process and mechanism through the characterization of irradiation parameters and the glass composition. When the surface of a glass plate is heated locally to a working point of the glass material by a focused CO₂ laser beam, a microlens is formed owing to surface tension. It was found possible to fabricate microlens easily placed at different focal position by controlling a laser power and an irradiation time. The volume of the fabricated microlens was found to be dependent on laser irradiation energy (laser power x irradiation time) and irradiated position. When a Corning 7059 glass plate was used, a convex microlens was obtained at the energy density smaller than ca.100 (μJ/μm² ). The dynamical stress change of the microlens was measured in-situ by using the ellipsometry analysis to make clear the formation process of microlens. The T-FDP (four detectors polarimeter of transmission type) was used for this analysis.

Citation Download Citation

Hiroshi Murotani, Moriaki Wakaki, Shuichi Kawabata, and Kenji Nakamoto "Fabrication of microlens using CO₂ laser and characterization of formation process", Proc. SPIE 5525, Laser Beam Shaping V, (29 September 2004); https://doi.org/10.1117/12.560369

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available