TNO TPD contributions to high-precision optical metrology: a Darwin metrology breadboard for ESA

Adrianus L. Verlaan; Teun C. van den Dool; Ben C.B. Braam; Bertrand Calvel; Rainer Sesselman; Wolfgang Poeschel; Denys Dontsov; Isabel Cabeza Vega; Eberhard Manske; Thilo Schuldt; Zoran Sodnik

doi:10.1117/12.559915

30 September 2004 TNO TPD contributions to high-precision optical metrology: a Darwin metrology breadboard for ESA

Adrianus L. Verlaan, Teun C. van den Dool, Ben C.B. Braam, Bertrand Calvel, Rainer Sesselman, Wolfgang Poeschel, Denys Dontsov, Isabel Cabeza Vega, Eberhard Manske, Thilo Schuldt, Zoran Sodnik

Author Affiliations +

Proceedings Volume 5528, Space Systems Engineering and Optical Alignment Mechanisms; (2004) https://doi.org/10.1117/12.559915
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

A Darwin precursor breadboard, comprising both fine lateral and longitudinal metrology sensors was designed, built and partially tested. The lateral metrology sensor was designed and built by TNO TPD and more than meets the imposed requirements. The longitudinal metrology sensor consists of a dual wavelength interferometer with an integrated delay line for optical path stabilisation. Here TNO TPD supplied the delay line and implemented the optical path difference stabilisation control. Experiments under ambient conditions show that noise reduction up to five orders of magnitude is achievable.

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Adrianus L. Verlaan, Teun C. van den Dool, Ben C.B. Braam, Bertrand Calvel, Rainer Sesselman, Wolfgang Poeschel, Denys Dontsov, Isabel Cabeza Vega, Eberhard Manske, Thilo Schuldt, and Zoran Sodnik "TNO TPD contributions to high-precision optical metrology: a Darwin metrology breadboard for ESA", Proc. SPIE 5528, Space Systems Engineering and Optical Alignment Mechanisms, (30 September 2004); https://doi.org/10.1117/12.559915

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