Absolute measurement of tilts via Fourier analysis of interferograms

Ronald W. Toland

doi:10.1117/12.559810

2 August 2004 Absolute measurement of tilts via Fourier analysis of interferograms

Ronald W. Toland

Proceedings Volume 5531, Interferometry XII: Techniques and Analysis; (2004) https://doi.org/10.1117/12.559810
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

The Fourier method of interferogram analysis requires the introduction of a constant tilt into the interferogram to serve as a 'carrier signal' for information on the figure of the surface under test. This tilt is usually removed in the first steps of analysis and ignored thereafter. However, in the problem of aligning optical components and systems, knowledge of part orientation is crucial to proper instrument performance. This paper outlines an algorithm which uses the normally ignored carrier signal in Fourier analysis to compute an absolute tilt (orientation) of the test surface. We also provide a brief outline of how this technique, incorporated in a rotating Twyman-Green interferometer, can be used in alignment and metrology of optical systems.

Citation Download Citation

Ronald W. Toland "Absolute measurement of tilts via Fourier analysis of interferograms", Proc. SPIE 5531, Interferometry XII: Techniques and Analysis, (2 August 2004); https://doi.org/10.1117/12.559810

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