Flatness nanometrology of large optically rough areas

Adrian Timcu; Dan Apostol; Victor S. Damian; Victor Nascov; Iuliana Iordache; Raluca Muller

doi:10.1117/12.583081

21 October 2004 Flatness nanometrology of large optically rough areas

Adrian Timcu, Dan Apostol, Victor S. Damian, Victor Nascov, Iuliana Iordache, Raluca Muller

Proceedings Volume 5581, ROMOPTO 2003: Seventh Conference on Optics; (2004) https://doi.org/10.1117/12.583081
Event: ROMOPTO 2003: Seventh Conference on Optics, 2003, Constanta, Romania

Abstract

A grating type interferometer uses a grazing reflection on the testing surface. The grazing reflectance could be very large and the projected roughness height on the incident light directions is small. We built such an interferometer using a diffractive optical element (DOE) realized in National Institute of Microtechnology. We obtain resolvable quality fringes for different materials from industrial quality metal pieces to wood. Contour map of a testing flatness metallic proof is obtained followng a 4 step algorithm: smoothing for both direction of interferogram, skeletonizing interference fringes, computing heights that correspond to the deviation from a plan surface for each fringe point; representing 3D contour lines of equal (400 nm) height.

Citation Download Citation

Adrian Timcu, Dan Apostol, Victor S. Damian, Victor Nascov, Iuliana Iordache, and Raluca Muller "Flatness nanometrology of large optically rough areas", Proc. SPIE 5581, ROMOPTO 2003: Seventh Conference on Optics, (21 October 2004); https://doi.org/10.1117/12.583081

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available