Determination Of Thickness Errors And Boundary Roughness From The Measured Performance Of A Multilayer Coating

Eberhard Spiller; Alan E. Rosenbluth

doi:10.1117/12.949671

6 May 1985 Determination Of Thickness Errors And Boundary Roughness From The Measured Performance Of A Multilayer Coating

Eberhard Spiller, Alan E. Rosenbluth

Author Affiliations +

Proceedings Volume 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics; (1985) https://doi.org/10.1117/12.949671
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

The influence of thickness errors and boundary imperfections on the performance of a multilayer x-ray mirror is discussed and it is shown that both can be obtained separately from a measured reflectivity curve at a short x-ray wavelength. Multilayers have greatly reduced scattering compared to single films, and for this reason rough boundaries and gradual transition layers between the film materials give practically identical performance. A simple Debye-Waller factor is not sufficient to describe the performance of a multilayer with many layers at short wavelengths.

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Eberhard Spiller and Alan E. Rosenbluth "Determination Of Thickness Errors And Boundary Roughness From The Measured Performance Of A Multilayer Coating", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949671

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