Fabrication of varied-line-space grating by elastic optics

Yongjun Xie; Shiping He; Shaojun Fu

doi:10.1117/12.571587

7 February 2005 Fabrication of varied-line-space grating by elastic optics

Yongjun Xie, Shiping He, Shaojun Fu

Proceedings Volume 5636, Holography, Diffractive Optics, and Applications II; (2005) https://doi.org/10.1117/12.571587
Event: Photonics Asia, 2004, Beijing, China

Abstract

We demonstrate a method to fabricate varied-line-spacing grating by employing elastic medium with variable vertical section. The advantages of this technique include continuous diversity of variation of line-space, high fabrication efficiency and low cost, etc. It is very difficult or unrealizable to produce this variation of line-space by traditional interference lithography. This kind of grating can be used in the optical position sensor and it can improve the precision of the sensor.

Citation Download Citation

Yongjun Xie, Shiping He, and Shaojun Fu "Fabrication of varied-line-space grating by elastic optics", Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); https://doi.org/10.1117/12.571587

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