Dielectric-based distributed Bragg reflector (DBR) mirrors for tunable MOEMS applications

Vicknesh Shanmugan; Mithilesh A. Shah; S. L. Teo; Akkipeddi Ramam

doi:10.1117/12.572816

30 December 2004 Dielectric-based distributed Bragg reflector (DBR) mirrors for tunable MOEMS applications

Vicknesh Shanmugan, Mithilesh A. Shah, S. L. Teo, Akkipeddi Ramam

Proceedings Volume 5641, MEMS/MOEMS Technologies and Applications II; (2004) https://doi.org/10.1117/12.572816
Event: Photonics Asia, 2004, Beijing, China

Abstract

High reflectivity Distributed Bragg Reflector (DBR) mirrors comprising of quarter wavelength stacks of epitaxial or dielectric layers are essential in various photonic active and passive devices. Our focus has been on optimizing plasma enhanced chemical vapor deposited (PECVD) Si₃N₄/SiO₂ (170nm/255nm ± 20nm) based DBR stacks for high reflectivity to be incorporated in a novel structure comprising of all dielectric based mirrors for tunable resonant cavity devices in a MEMS configuration. Simulated results based on Macleod program predicts a high reflectivity of 99.7% for 10.5 pairs of quarter wavelength layers of Si₃N₄ and SiO₂ centered at the telecom wavelength of 1550 nm. Si₃N₄/SiO₂ DBR pairs of 5.5, 7.5 and 10.5 are deposited by PECVD on InP substrate and reflectance spectra observed on spectrophotometer. A flat pass band of 354nm bandwidth and 99.8% peak reflectivity for 10.5 pairs of DBR stack is observed. Characterization of DBR layers is done using ToF-SIMS for interface abruptness. XPS and Ellispometry is used to ascertain stoichiometry and refractive index respectively. CHF₃ chemistry is used to etch the DBR mirror stacks to achieve highly anisotropic walls by ICP technique, as observed under SEM. We are able to demonstrate filtering of a single wavelength in the C-band region, for different cavity spacing of SiO₂ layer, sandwiched between two highly reflecting mirrors.

Citation Download Citation

Vicknesh Shanmugan, Mithilesh A. Shah, S. L. Teo, and Akkipeddi Ramam "Dielectric-based distributed Bragg reflector (DBR) mirrors for tunable MOEMS applications", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); https://doi.org/10.1117/12.572816

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