Parallel valveless micropump with two flexible diaphragms

Yufeng Su; Wenyuan Chen; Feng Cui; Weiping Zhang

doi:10.1117/12.575835

30 December 2004 Parallel valveless micropump with two flexible diaphragms

Yufeng Su, Wenyuan Chen, Feng Cui, Weiping Zhang

Proceedings Volume 5641, MEMS/MOEMS Technologies and Applications II; (2004) https://doi.org/10.1117/12.575835
Event: Photonics Asia, 2004, Beijing, China

Abstract

This paper presents a parallel dynamic passive valveless micropump, which consists of three layers-valve, diaphragm and electromagnetic coil. The valve is wetly etched in a silicon wafer, the diaphragm is a PDMS (polydimethyl siloxane) film spun on a silicon wafer with embedded permanent magnet posts, and the coil is electroplated on a silicon substrate. Under the actuation of the magnetic field of the coil, the flexible diaphragm can be displaced upwards and downwards. After analyzing magnetic and mechanical characteristic of the flexible membrane and direction-dependence of the diffuser, this paper designed a micropump. And the relative length (L/d) of the micropump’s diffuser is 4.An 7×7 array of permanent magnetic posts is embedded in the PDMS film. Two diaphragms work in an anti-step mode, which can relieve the liquid shock and increase the discharge of the micropump. ANSYS® and Matlab® are adopted to analyze the actuation effect of the coil and the flow characteristic of the micropump. Results show that when actuated under a 0.3A, 100Hz current ,the displacement of the diaphragm is more than 30μm, and the discharge of the micropump is about 6μL/s.

Citation Download Citation

Yufeng Su, Wenyuan Chen, Feng Cui, and Weiping Zhang "Parallel valveless micropump with two flexible diaphragms", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); https://doi.org/10.1117/12.575835

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