Study on optical parts of MOEMS optical switch with low insertion loss

Anjie Ming; Jingqiu Liang; Weihua Lan; Wei Dong; Jinsong Yao; Weibiao Wang; Zichun Le; Weiyou Chen; Lijun Wang

doi:10.1117/12.570729

30 December 2004 Study on optical parts of MOEMS optical switch with low insertion loss

Anjie Ming, Jingqiu Liang, Weihua Lan, Wei Dong, Jinsong Yao, Weibiao Wang, Zichun Le, Weiyou Chen, Lijun Wang

Proceedings Volume 5641, MEMS/MOEMS Technologies and Applications II; (2004) https://doi.org/10.1117/12.570729
Event: Photonics Asia, 2004, Beijing, China

Abstract

We study insertion losses of optical switch when the laser beam is propagating during the free space between two single mode fibers (SMFs) and the related assemblage challenges; Then a new packaging structure is developed for the hybrid-integration of free-space MOEMS (micro-opto-electro-mechanical systems) chip with a silicon micromachined submount to improve alignment accuracy. The submount is designed to accommodate various free-space MOEMS chips with minimal active optical alignment, thus reducing the packaging cost. The silicon submount has a central recess to place the MOEMS chip in, sixteen V-grooves for optical fibers, and micropits for micro ball lenses, all bulk micromachined at the same time by a single anisotropic wet etching step. A corner compensation technique is employed to prevent erosion of the convex corners, where different geometries meet. Through this assembling method, the fiber, micro ball lens can be aligned preciously thus reduced lateral and angular misalignment between them. Then total insertion losses can be decreased.

Citation Download Citation

Anjie Ming, Jingqiu Liang, Weihua Lan, Wei Dong, Jinsong Yao, Weibiao Wang, Zichun Le, Weiyou Chen, and Lijun Wang "Study on optical parts of MOEMS optical switch with low insertion loss", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); https://doi.org/10.1117/12.570729

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available