A simple method to monitor the beam flux of neutral free radicals produced by photo-deionization of negative ion beams

Keiji Hayashi; Takuo Kanayama; Takashi Oseki; Noriyoshi Omote

doi:10.1117/12.596393

8 October 2004 A simple method to monitor the beam flux of neutral free radicals produced by photo-deionization of negative ion beams

Keiji Hayashi, Takuo Kanayama, Takashi Oseki, Noriyoshi Omote

Author Affiliations +

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596393
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

Ion-current difference measurement by light intensity modulation (ICD) is introduced as a convenient method to determine the number flux of netural free radicals produced by photo-deionization of a negative ion beam for the purpose of surface-reaction-selective device processing. The ICD setup developed in this study exhibited the high precision and the high sensitivity under the experimental condition that the beam kinetic energy of the neutral free radicals was higher than 10 keV.

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Keiji Hayashi, Takuo Kanayama, Takashi Oseki, and Noriyoshi Omote "A simple method to monitor the beam flux of neutral free radicals produced by photo-deionization of negative ion beams", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596393

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