Laser direct write for release of SiO2 MEMS and nano-scale devices

Margaret H. Abraham; Henry Helvajian

doi:10.1117/12.596553

8 October 2004 Laser direct write for release of SiO₂ MEMS and nano-scale devices

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596553
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

We have developed a novel process for releasing MEMS and nano-scale devices formed in SiO₂ on a Si substrate. Current approaches for releasing MEMS made of SiO₂ use wet chemical etches (e.g. EDTA or KOH) or gas phase chemical etches such as xenon difluoride. These approaches are inherently messy and difficult to control. We have shown that it is possible to release patterned SiO₂ structures using a direct write laser assisted chemical etching technique. The developed process removes Si only from the immediate area leaving behind the SiO₂ device. The technique allows the surrounding larger area of the Si wafer to be conserved for use in packaging or integration with electronics. Further, as the release is accomplished in the gas phase, we see none of the problems of "stiction" associated with a liquid etch release process. In fact, we have found this method to be so gentle that we have been able to release devices made from SiO₂ films on the order of hundreds of nanometers.

Citation Download Citation

Margaret H. Abraham and Henry Helvajian "Laser direct write for release of SiO₂ MEMS and nano-scale devices", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596553

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available