Laser machinable glass

Hirotaka Koyo; Masanori Shojiya; Keiji Tsunetomo

doi:10.1117/12.595770

8 October 2004 Laser machinable glass

Hirotaka Koyo, Masanori Shojiya, Keiji Tsunetomo

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.595770
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

Recently we found that titanium ions in glass are effective to reduce the ablation threshold in the UV laser irradiation. In case of Nd:YAG fourth harmonic generation (FHG, wavelength: 266 nm) irradiation, glass containing titanium ions showed 1/10 times smaller threshold compared with conventional one used for optics or windows. We named this Ti-containing glass Laser Machinable Glass (LMG). In this paper we present some applications made of LMG, a 4x4 planar micro hole array (PMH) for optical fibers alignment, a micro well array for reaction of a small amount of chemicals, and a micro channel used in the bio-chemical field. Using LMG for laser machining, all samples were fabricated precisely without cracking and chipping. We also successfully synthesized new Ti-containing laser machinable glass with thermal expansion coefficient below 40x10^-7 K^-1. The ablation threshold of this low-thermal-expansion glass was about 1.4 times lower than that of Pyrex. Moreover, this glass showed 25 times higher durability to NaOH (pH=10) than Pyrex.

Citation Download Citation

Hirotaka Koyo, Masanori Shojiya, and Keiji Tsunetomo "Laser machinable glass", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.595770

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