Optical and electrodynamic analysis of a novel spatial light modulator

Jie Zhang; Hongqiao Fu; Shanglian Huang; Yi Wu

doi:10.1117/12.590275

22 January 2005 Optical and electrodynamic analysis of a novel spatial light modulator

Jie Zhang, Hongqiao Fu, Shanglian Huang, Yi Wu

Proceedings Volume 5717, MEMS/MOEMS Components and Their Applications II; (2005) https://doi.org/10.1117/12.590275
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

In this paper, a novel spatial light modulator is presented. A pixel of the novel spatial modulator is turned fully OFF when all pixel ribbons form a flat reflective plane and turned ON by electrostatically deflecting alternate ribbons to produce a blazed diffraction grating. According to scalar diffraction theory, the optical performance is analyzed in details. And the influence factors on diffractive efficiency are discussed. Meanwhile, with the application of electromagnetics, electrodynamics analysis is introduced including the relation between threshold voltage and structure material characteristic. Computer simulation on the condition of different incidence light, different duty-cycle is carried on, presenting the relation between diffraction efficiency and wavelength, duty-cycle, etc. There is a promising foreground based on optimization of structure.

Citation Download Citation

Jie Zhang, Hongqiao Fu, Shanglian Huang, and Yi Wu "Optical and electrodynamic analysis of a novel spatial light modulator", Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); https://doi.org/10.1117/12.590275

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